Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4719125 | Cyclosilazane polymers as dielectric films in integrated circuit fabrication technology | Louis G. Anello, Satish K. Gupta, Stephen W. Kirtley, George S. Wooster | 1988-01-12 |
| 4615764 | SF6/nitriding gas/oxidizer plasma etch system | Stephen M. Bobbio, Marie C. Flanigan, Kenneth M. Thrun | 1986-10-07 |
| 4582581 | Boron trifluoride system for plasma etching of silicon dioxide | Marie C. Flanigan, Stephen M. Bobbio, Robert F. Aycock, Kenneth M. Thrun | 1986-04-15 |