Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4615764 | SF6/nitriding gas/oxidizer plasma etch system | Stephen M. Bobbio, Kenneth M. Thrun, Ralph L. DePrenda | 1986-10-07 |
| 4582581 | Boron trifluoride system for plasma etching of silicon dioxide | Stephen M. Bobbio, Robert F. Aycock, Ralph L. DePrenda, Kenneth M. Thrun | 1986-04-15 |
| 4465552 | Method of selectively etching silicon dioxide with SF.sub.6 /nitriding component gas | Stephen M. Bobbio, Kenneth M. Thrun | 1984-08-14 |