Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8829938 | Measuring method and device for characterizing a semiconductor component | Andreas Schütt, Helmut Foll, Wilhelm Warta, Martin Kasemann | 2014-09-09 |
| 7208069 | Device for etching semiconductors with a large surface area | Marc Christophersen, Jörg BAHR, Kay Steen, Georgi Popkirov, Helmut Foll | 2007-04-24 |