Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501847 | Apparatus and method for generating a vapor for a CVD or PVD device | Michael D. Long, Birgit Irmgard Beccard, Karl-Heinz Trimborn, Andy EICHLER, Andreas Poqué | 2019-12-10 |
| 10267768 | Device and method for determining the concentration of a vapor by means of an oscillating body sensor | Birgit Irmgard Beccard, Karl-Heinz Trimborn, Michael D. Long, Andy EICHLER, Nael Al Ahmad | 2019-04-23 |
| 9942946 | Device for generating vapor from solid or liquid starting material for CVD or PVD apparatus | Michael D. Long, Andreas Poqué, Birgit Irmgard Beccard, Karl-Heinz Trimborn | 2018-04-10 |