Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501847 | Apparatus and method for generating a vapor for a CVD or PVD device | Michael D. Long, Birgit Irmgard Beccard, Claudia Cremer, Karl-Heinz Trimborn, Andy EICHLER | 2019-12-10 |
| 9942946 | Device for generating vapor from solid or liquid starting material for CVD or PVD apparatus | Michael D. Long, Claudia Cremer, Birgit Irmgard Beccard, Karl-Heinz Trimborn | 2018-04-10 |
| 7855492 | Lamp holder for a dielectric barrier discharge lamp | Wolfgang Schiene, Georg Greuel, Michael Schaaf | 2010-12-21 |