Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11236985 | Systems and methods for cyclic error correction in a heterodyne interferometer | Greg C. Felix | 2022-02-01 |
| 7924433 | Displacement measurement system and method of use | — | 2011-04-12 |
| 7561280 | Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components | Miao Zhu, Alan B. Ray, Gerry Owen, Carol Courville | 2009-07-14 |
| 7545507 | Displacement measurement system | Miao Zhu, Geraint Owen, Alan B. Ray, Carol Courville | 2009-06-09 |
| 7436519 | System and method for interferometer non-linearity compensation | David C. Chu, Lee Kalem | 2008-10-14 |
| 7362447 | Low walk-off interferometer | — | 2008-04-22 |
| 7355719 | Interferometer for measuring perpendicular translations | — | 2008-04-08 |
| 7251039 | Low non-linear error displacement measuring interferometer | Robert Todd Belt | 2007-07-31 |
| 7130056 | System and method of using a side-mounted interferometer to acquire position information | Louis F. Mueller, Douglas P. Woolverton, Jeffrey Young, Alan B. Ray, David C. Chu | 2006-10-31 |