| 7705994 |
Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs |
— |
2010-04-27 |
| 7561280 |
Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components |
William Clay Schluchter, Miao Zhu, Gerry Owen, Carol Courville |
2009-07-14 |
| 7545507 |
Displacement measurement system |
William Clay Schluchter, Miao Zhu, Geraint Owen, Carol Courville |
2009-06-09 |
| 7440113 |
Littrow interferometer |
William Trutna, Geraint Owen, James Prince, Eric Johnstone, Miao Zhu +1 more |
2008-10-21 |
| 7224466 |
Compact multi-axis interferometer |
— |
2007-05-29 |
| 7130056 |
System and method of using a side-mounted interferometer to acquire position information |
William Clay Schluchter, Louis F. Mueller, Douglas P. Woolverton, Jeffrey Young, David C. Chu |
2006-10-31 |
| 6897962 |
Interferometer using beam re-tracing to eliminate beam walk-off |
Eric Johnstone, John J. Bockman, Kerry Bagw ell |
2005-05-24 |
| 6806960 |
Compact beam re-tracing optics to eliminate beam walk-off in an interferometer |
Kerry Bagwell, Greg C. Felix, John J. Bockman |
2004-10-19 |
| 4676868 |
Method for planarizing semiconductor substrates |
Paul E. Riley, Paul Joseph Bayer |
1987-06-30 |