Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7705994 | Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs | — | 2010-04-27 |
| 7561280 | Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components | William Clay Schluchter, Miao Zhu, Gerry Owen, Carol Courville | 2009-07-14 |
| 7545507 | Displacement measurement system | William Clay Schluchter, Miao Zhu, Geraint Owen, Carol Courville | 2009-06-09 |
| 7440113 | Littrow interferometer | William Trutna, Geraint Owen, James Prince, Eric Johnstone, Miao Zhu +1 more | 2008-10-21 |
| 7224466 | Compact multi-axis interferometer | — | 2007-05-29 |
| 7130056 | System and method of using a side-mounted interferometer to acquire position information | William Clay Schluchter, Louis F. Mueller, Douglas P. Woolverton, Jeffrey Young, David C. Chu | 2006-10-31 |
| 6897962 | Interferometer using beam re-tracing to eliminate beam walk-off | Eric Johnstone, John J. Bockman, Kerry Bagw ell | 2005-05-24 |
| 6806960 | Compact beam re-tracing optics to eliminate beam walk-off in an interferometer | Kerry Bagwell, Greg C. Felix, John J. Bockman | 2004-10-19 |
| 4676868 | Method for planarizing semiconductor substrates | Paul E. Riley, Paul Joseph Bayer | 1987-06-30 |