Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7360546 | Cleaning apparatus for semiconductor wafer | — | 2008-04-22 |
| 6446645 | Dip cleaning system for a substrate, system for evaluating the amount of particles and method of evaluating the amount of particles adhering to a substrate | — | 2002-09-10 |
| 6154040 | Apparatus for testing an electronic device | Teruaki Tsukamoto | 2000-11-28 |