Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653263 | Multi-beam writing of pattern areas of relaxed critical dimension | Elmar Platzgummer | 2017-05-16 |
| 4731639 | Microfilm pickup camera with marking means for screened originals | Walter Gutmann, Gerhard Schreiner, Wolfram Betzold, Wilfried Hofmann, Traugott Liermann | 1988-03-15 |