Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900510 | MEMS devices and methods for inhibiting errant motion of MEMS components | Hirokazu Tamura, Alan L. Sidman, Jiang Zhe | 2005-05-31 |
| 6858911 | MEMS actuators | Hirokazu Tamura, Justin C. Borski, Alan L. Sidman | 2005-02-22 |
| 6812055 | MEMS devices and methods of manufacture | Hirokazu Tamura, Akira Mugino, Alan L. Sidman | 2004-11-02 |
| 6717227 | MEMS devices and methods of manufacture | Hirokazu Tamura, Akira Mugino, Alan L. Sidman | 2004-04-06 |