Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9275870 | Plasma processing method and plasma processing device | Lei Xu, Tuqiang Ni | 2016-03-01 |
| 9099284 | Method and system for autotuning of RF match | James H. C. Yang, Stanley Liu | 2015-08-04 |