Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8094926 | Ultrafine pattern discrimination using transmitted/reflected workpiece images for use in lithography inspection system | — | 2012-01-10 |
| 7627164 | Pattern inspection method and apparatus with high-accuracy pattern image correction capability | Junji Oaki | 2009-12-01 |