Issued Patents All Time
Showing 51–63 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7101436 | Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display | Yukio Taniguchi, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa, Yoshinobu Kimura +1 more | 2006-09-05 |
| 7087505 | Semiconductor device including semiconductor thin films having different crystallinity, substrate of the same, and manufacturing method of the same, and liquid crystal display and manufacturing method of the same | Yoshinobu Kimura, Yoshitaka Yamamoto, Mikihiko Nishitani, Masato Hiramatsu, Masayuki Jyumonji +1 more | 2006-08-08 |
| 7067404 | Thin film semiconductor device having a gate electrode insulator formed through high-heat oxidization | Yasuhisa Oana | 2006-06-27 |
| 7063478 | Crystallization apparatus and crystallization method | Yukio Taniguchi | 2006-06-20 |
| 7056626 | Crystallization apparatus, crystallization method, thin film transistor and display apparatus | Yukio Taniguchi, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa, Yoshinobu Kimura +1 more | 2006-06-06 |
| 7011709 | Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, thin film transistor, and display | Yukio Taniguchi, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa, Yoshinobu Kimura +1 more | 2006-03-14 |
| 7001461 | Crystallization apparatus, crystallization method, and phase shifter | Yukio Taniguchi, Hirotaka Yamaguchi, Mikihiko Nishitani, Susumu Tsujikawa, Yoshinobu Kimura +1 more | 2006-02-21 |
| 6953714 | Thin film semiconductor device having arrayed configuration of semiconductor crystals and a method for producing it | Yoshinobu Kimura, Mikihiko Nishitani, Masato Hiramatsu, Masayuki Jyumonji, Yoshitaka Yamamoto +1 more | 2005-10-11 |
| 6946367 | Methods for forming a semiconductor thin film | Mikihiko Nishitani, Yoshinobu Kimura, Masayuki Jyumonji, Yukio Taniguchi, Masato Hiramatsu +1 more | 2005-09-20 |
| 6870126 | Semiconductor device, annealing method, annealing apparatus and display apparatus | Masayuki Jyumonji, Yoshinobu Kimura, Mikihiko Nishitani, Masato Hiramatsu, Yukio Taniguchi +2 more | 2005-03-22 |
| 6828178 | Thin film semiconductor device having arrayed configuration of semiconductor crystals and a method for producing it | Yasuhisa Oana, Hiroyuki Abe, Yoshitaka Yamamoto, Hideo Koseki, Mitsunori Warabisako | 2004-12-07 |
| 6819401 | Exposure method and apparatus | Susumu Tsujikawa, Yukio Taniguchi, Hirotaka Yamaguchi | 2004-11-16 |
| 6816231 | Method and apparatus for exposure | Susumu Tsujikawa, Yukio Taniguchi, Hirotaka Yamaguchi | 2004-11-09 |