Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8136479 | Plasma treatment apparatus and plasma treatment method | Hideo Sugai, Tetsuya Ide, Atsushi Sasaki, Yukihiko Nakata | 2012-03-20 |
| 8009345 | Crystallization apparatus, crystallization method, device, and light modulation element | Yukio Taniguchi, Masakiyo Matsumura, Tomoya Kato, Takahiko Endo | 2011-08-30 |
| 7998841 | Method for dehydrogenation treatment and method for forming crystalline silicon film | Hajime Shirai | 2011-08-16 |
| 7897946 | Crystallization apparatus, crystallization method, device, and light modulation element | Yukio Taniguchi, Masakiyo Matsumura, Tomoya Kato, Takahiko Endo | 2011-03-01 |
| 7830606 | Optical device and crystallization device | Takashi Ono, Masakiyo Matsumura | 2010-11-09 |
| 7727913 | Method of crystallizing semiconductor film | Shigeyuki Shimoto, Takashi Ono, Masakiyo Matsumura | 2010-06-01 |
| 7728251 | Plasma processing apparatus with dielectric plates and fixing member wavelength dependent spacing | Tetsuya Ide, Atsushi Sasaki, Yukihiko Nakata | 2010-06-01 |
| 7612943 | Optical device and crystallization device | Takashi Ono, Masakiyo Matsumura | 2009-11-03 |
| 7446060 | Thin-film forming method using silane and an oxidizing gas | Masashi Goto, Yukihiko Nakata | 2008-11-04 |
| 7311796 | Plasma processing apparatus | Masashi Goto, Yukihiko Nakata, Tetsuya Okamoto | 2007-12-25 |
| 7307028 | Film-forming method, method of manufacturing semiconductor device, semiconductor device, method of manufacturing display device, and display device | Masashi Goto, Yukihiko Nakata | 2007-12-11 |
| 6692848 | Magnetic disk apparatus | Toshiaki Ohtani, Naotoshi Akamatsu, Kenji Tasaka | 2004-02-17 |
| 4604294 | Process for forming an organic thin film | Masahiro Tanaka, Kazuo Nate, Mitsuo Nakatani | 1986-08-05 |
| 4530746 | Photosensitive resin composition | Kazuo Nate, Mitsuo Nakatani, Hitoshi Yokono, Takeshi Endo | 1985-07-23 |
| 4495218 | Process for forming thin film | Mitsuo Nakatani, Kazuo Nate, Masaaki Okunaka, Hitoshi Yokono | 1985-01-22 |