Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170182 | Ribbon beam angle adjustment in an ion implantation system | Zhimin Wan, Chi-Ming Huang | 2024-12-17 |
| 11600464 | Apparatus and method for reduction of particle contamination by bias voltage | — | 2023-03-07 |
| 9748072 | Lower dose rate ion implantation using a wider ion beam | Zhimin Wan, Rekha Padmanabhan, Xiao Bai, Gary N. Cai, Ching-I Li +4 more | 2017-08-29 |