Issued Patents All Time
Showing 26–50 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8598563 | Phase-change material and phase-change type memory device | Yuji Sutou, Yuta Saito, Toshiya Kamada | 2013-12-03 |
| 8580688 | Copper interconnection structure and method for forming copper interconnections | Akihiro Shibatomi | 2013-11-12 |
| 8531033 | Contact plug structure, semiconductor device, and method for forming contact plug | Akihiro Shibatomi, Kouji Neishi | 2013-09-10 |
| 8451394 | Liquid crystal display device and manufacturing method therefor | Hideaki Kawakami | 2013-05-28 |
| 8420535 | Copper interconnection, method for forming copper interconnection structure, and semiconductor device | Akihiro Shibatomi | 2013-04-16 |
| 8372745 | Semiconductor device, its manufacturing method, and sputtering target material for use in the method | — | 2013-02-12 |
| 8324730 | Copper interconnection structure and method for forming copper interconnections | Akihiro Shibatomi | 2012-12-04 |
| 8304908 | Semiconductor device having a multilevel interconnect structure and method for fabricating the same | Yoshito Fujii, Jun Iijima, Noriyoshi Shimizu, Kazuyoshi Maekawa, Koji Arita +2 more | 2012-11-06 |
| 8258626 | Copper interconnection, method for forming copper interconnection structure, and semiconductor device | Akihiro Shibatomi | 2012-09-04 |
| 8247321 | Method of manufacturing semiconductor device, semiconductor device, electronic instrument, semiconductor manufacturing apparatus, and storage medium | Kenji Matsumoto, Hitoshi Itoh, Hiroshi Sato, Koji Neishi | 2012-08-21 |
| 8242015 | Film forming method and film forming apparatus | Kenji Matsumoto, Hitoshi Itoh, Koji Neishi | 2012-08-14 |
| 8188599 | Semiconductor device, its manufacturing method, and sputtering target material for use in the method | — | 2012-05-29 |
| 8169079 | Copper interconnection structures and semiconductor devices | Akihiro Shibatomi | 2012-05-01 |
| 8164701 | Liquid crystal display device | Hideaki Kawakami | 2012-04-24 |
| 8163649 | Copper interconnection structure, semiconductor device, and method for forming copper interconnection structure | Akihiro Shibatomi | 2012-04-24 |
| 8133813 | Semiconductor device with a barrier film | Makoto Wada, Shingo Takahashi, Noriyoshi Shimizu, Hideki Shibata, Satoshi Nishikawa +3 more | 2012-03-13 |
| 8112885 | Method for forming copper interconnection structures | Akihiro Shibatomi | 2012-02-14 |
| 8089158 | Liquid crystal display device and manufacturing method therefor | Hideaki Kawakami | 2012-01-03 |
| 8084860 | Liquid crystal display device and manufacturing method therefor | Hideaki Kawakami | 2011-12-27 |
| 8008184 | Semiconductor device manufacturing method, semiconductor manufacturing apparatus and storage medium | Kenji Matsumoto, Shigetoshi Hosaka, Koji Neishi | 2011-08-30 |
| 7943517 | Semiconductor device with a barrier film | Makoto Wada, Shingo Takahashi, Noriyoshi Shimizu, Hideki Shibata, Satoshi Nishikawa +3 more | 2011-05-17 |
| 7940361 | Copper alloy and liquid-crystal display device | — | 2011-05-10 |
| 7782413 | Liquid crystal display device and manufacturing method therefor | Hideaki Kawakami | 2010-08-24 |
| 7782433 | Copper alloy and liquid-crystal display device | — | 2010-08-24 |
| 7755192 | Copper interconnection structure, barrier layer including carbon and hydrogen | Akihiro Shibatomi | 2010-07-13 |