Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6552350 | System and method for providing a lithographic light source for a semiconductor manufacturing process | Edwin G. Haas, Robert M. Gutowski | 2003-04-22 |
| 6437349 | Fluid nozzle system and method in an emitted energy system for photolithography | Edwin G. Haas, Robert M. Gutowski | 2002-08-20 |
| 6190835 | System and method for providing a lithographic light source for a semiconductor manufacturing process | Edwin G. Haas, Robert M. Gutowski | 2001-02-20 |
| 6133577 | Method and apparatus for producing extreme ultra-violet light for use in photolithography | Robert M. Gutowski, Alan M. Todd | 2000-10-17 |
| 6105885 | Fluid nozzle system and method in an emitted energy system for photolithography | Edwin G. Haas, Robert M. Gutowski | 2000-08-22 |
| 6065203 | Method of manufacturing very small diameter deep passages | Edwin G. Haas, Robert M. Gutowski | 2000-05-23 |
| 4933546 | Orifice ring ion beam neutralizer | Eric P. Muntz, John W. Brook | 1990-06-12 |