Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6552350 | System and method for providing a lithographic light source for a semiconductor manufacturing process | Edwin G. Haas, Vincent S. Calia | 2003-04-22 |
| 6437349 | Fluid nozzle system and method in an emitted energy system for photolithography | Edwin G. Haas, Vincent S. Calia | 2002-08-20 |
| 6353232 | Holder assembly system and method in an emitted energy system for photolithography | Edwin G. Haas, Michael A. Peacock | 2002-03-05 |
| 6190835 | System and method for providing a lithographic light source for a semiconductor manufacturing process | Edwin G. Haas, Vincent S. Calia | 2001-02-20 |
| 6180952 | Holder assembly system and method in an emitted energy system for photolithography | Edwin G. Haas, Michael A. Peacock | 2001-01-30 |
| 6133577 | Method and apparatus for producing extreme ultra-violet light for use in photolithography | Vincent S. Calia, Alan M. Todd | 2000-10-17 |
| 6105885 | Fluid nozzle system and method in an emitted energy system for photolithography | Edwin G. Haas, Vincent S. Calia | 2000-08-22 |
| 6065203 | Method of manufacturing very small diameter deep passages | Edwin G. Haas, Vincent S. Calia | 2000-05-23 |