Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5748436 | Ceramic electrostatic chuck and method | Kotaro Mino, Hisayuki Miyata, Haruhide Inoue | 1998-05-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5748436 | Ceramic electrostatic chuck and method | Kotaro Mino, Hisayuki Miyata, Haruhide Inoue | 1998-05-05 |