HI

Haruhide Inoue

AX Advanced Ceramic X: 1 patents #14 of 32Top 45%
Overall (All Time): #3,683,295 of 4,157,543Top 90%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
5748436 Ceramic electrostatic chuck and method Junich Honma, Kotaro Mino, Hisayuki Miyata 1998-05-05