Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11332364 | Method for forming MEMS cavity structure | Wooicheang Goh, Shrowthi S. N. Bharadwaja | 2022-05-17 |
| 11310606 | MEMS microphone | Bei Tong, Zhan Zhan, Yang Li, Xiaohui Zhong, Lian Duan | 2022-04-19 |
| 11305988 | Method for preparing silicon wafer with rough surface and silicon wafer | Wooicheang Goh, Lieng Loo | 2022-04-19 |
| 11192782 | Method for preparing silicon wafer with rough surface and silicon wafer | Wooicheang Goh, Lieng Loo | 2021-12-07 |
| 11159895 | Piezoelectric type and capacitive type combined MEMS microphone | Bei Tong, Zhan Zhan, Yang Li, Xiaohui Zhong, Lian Duan | 2021-10-26 |
| 11111134 | Method for processing conductive structure | Lieng Loo, Shaoquan Wang, Xiaohui Zhong, KianHeng Goh | 2021-09-07 |
| 10947110 | MEMS microphone and manufacturing method for making same | Lieng Loo, Shaoquan Wang, Xiaohui Zhong | 2021-03-16 |
| 10818511 | Plane polishing method of silicon wafer and processing method of silicon wafer | Lieng Loo, Wooicheang Goh | 2020-10-27 |