Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11891297 | Motion control structure and actuator | Ze Tao, Zhan Zhan, Kahkeen Lai, Yang Li | 2024-02-06 |
| 11832043 | Microphone and method for manufacturing the same | Lanlan Tu, Kahkeen Lai | 2023-11-28 |
| 11332364 | Method for forming MEMS cavity structure | Shrowthi S. N. Bharadwaja, Kahkeen Lai | 2022-05-17 |
| 11305988 | Method for preparing silicon wafer with rough surface and silicon wafer | Lieng Loo, Kahkeen Lai | 2022-04-19 |
| 11192782 | Method for preparing silicon wafer with rough surface and silicon wafer | Lieng Loo, Kahkeen Lai | 2021-12-07 |
| 10818511 | Plane polishing method of silicon wafer and processing method of silicon wafer | Lieng Loo, Kahkeen Lai | 2020-10-27 |