| 7147767 |
Plating solutions for electrochemical or chemical deposition of copper interconnects and methods therefor |
Steven D. Boyd, William M. Lamanna, Michael J. Parent, Lawrence A. Zazzera, Haiyan Zhang |
2006-12-12 |
| 6884338 |
Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor |
William M. Lamanna, Michael J. Parent, Lawrence A. Zazzera |
2005-04-26 |
| 6858124 |
Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor |
Lawrence A. Zazzera, Michael J. Parent, William M. Lamanna |
2005-02-22 |
| 6540930 |
Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases |
Fred E. Behr, Michael G. Costello, Richard M. Flynn, Richard M. Minday, John G. Owens +2 more |
2003-04-01 |
| 6394107 |
Use of fluorinated ketones as wet cleaning agents for vapor reactors and vapor reactor components |
Jason M. Kehren, Richard M. Minday |
2002-05-28 |
