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Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor |
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| 6858124 |
Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor |
Michael J. Parent, William M. Lamanna, Susrut Kesari |
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Fluorochemical treatment for silicon articles |
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Fluorinated solvent compositions containing hydrogen fluoride |
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Fluorinated solvent compositions containing hydrogen fluoride |
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