Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421603 | Composition for high temperature atomic layer deposition of high quality silicon oxide thin films | Xinjian Lei, Madhukar Bhaskara Rao | 2025-09-23 |
| 12297115 | High temperature atomic layer deposition of silicon-containing film | Xinjian Lei | 2025-05-13 |
| 12230496 | Organoaminosilane precursors and methods for depositing films comprising same | Mark Leonard O'Neill, Manchao Xiao, Xinjian Lei, Richard Ho, Haripin Chandra +1 more | 2025-02-18 |