Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421603 | Composition for high temperature atomic layer deposition of high quality silicon oxide thin films | Meiliang Wang, Xinjian Lei | 2025-09-23 |
| 12221692 | Compositions and methods using same for deposition of silicon-containing film | Robert Gordon Ridgeway, Raymond Nicholas Vrtis | 2025-02-11 |