Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249488 | Plasma shaper to control ion flux distribution of plasma source | Alexandre Likhanskii, Alan V. Hayes | 2025-03-11 |
| 12191156 | Ribbon beam plasma enhanced chemical vapor deposition system for anisotropic deposition of thin films | John Hautala, Tristan Y. Ma | 2025-01-07 |