Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249488 | Plasma shaper to control ion flux distribution of plasma source | Peter F. Kurunczi, Alan V. Hayes | 2025-03-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249488 | Plasma shaper to control ion flux distribution of plasma source | Peter F. Kurunczi, Alan V. Hayes | 2025-03-11 |