TA

Toshiya Aoyagi

UL Ulvac: 1 patents #4 of 13Top 35%
Overall (2025): #190,062 of 469,880Top 45%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12293905 Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus Makoto Arai, Satoru Takasawa 2025-05-06