Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293905 | Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus | Toshiya Aoyagi, Makoto Arai | 2025-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293905 | Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus | Toshiya Aoyagi, Makoto Arai | 2025-05-06 |