Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266514 | Substrate processing apparatus and substrate temperature correction method | Rei Ibuka, Dai Igarashi | 2025-04-01 |
| 12203746 | Rotary encoder | Shintaro Ueno, Yoshinori Shibahara | 2025-01-21 |