Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266514 | Substrate processing apparatus and substrate temperature correction method | Dai Igarashi, Yuki Kato | 2025-04-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266514 | Substrate processing apparatus and substrate temperature correction method | Dai Igarashi, Yuki Kato | 2025-04-01 |