Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387955 | Substrate processing apparatus and substrate processing method | Tatsuya Mukoyama, Kazunori Kazama, Shigeru Kubota, Sho Ichinose, Junya Chizuwa +2 more | 2025-08-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387955 | Substrate processing apparatus and substrate processing method | Tatsuya Mukoyama, Kazunori Kazama, Shigeru Kubota, Sho Ichinose, Junya Chizuwa +2 more | 2025-08-12 |