TM

Tatsuya Mukoyama

TL Tokyo Electron Limited: 1 patents #256 of 785Top 35%
Overall (2025): #198,880 of 469,880Top 45%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12387955 Substrate processing apparatus and substrate processing method Wataru Nakagomi, Kazunori Kazama, Shigeru Kubota, Sho Ichinose, Junya Chizuwa +2 more 2025-08-12