Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394645 | Substrate processing system and method of teaching transfer device | Tomoyuki Oshima | 2025-08-19 |
| 12362215 | Apparatus for transferring substrate and method for transferring substrate | Dongwei Li, Lingxin JIANG, Shinya Okano, Toshiaki Kodama, Wataru Matsumoto | 2025-07-15 |
| 12330888 | Substrate transfer device and method of cooling arm | Wataru Matsumoto | 2025-06-17 |
| 12322642 | Substrate transfer device and substrate transfer method | — | 2025-06-03 |
| 12224193 | Control method and substrate transfer system | — | 2025-02-11 |
| 12211719 | Method of controlling substrate transfer system and the substrate transfer system | Wataru Matsumoto | 2025-01-28 |