Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431372 | Heating device, substrate processing system, and heating method | Takashi Sugimoto, Hiroyuki Takahashi | 2025-09-30 |
| 12387954 | Teaching method for transfer device, and transfer system | Takashi Sugimoto | 2025-08-12 |
| 12362215 | Apparatus for transferring substrate and method for transferring substrate | Takehiro Shindo, Dongwei Li, Lingxin JIANG, Toshiaki Kodama, Wataru Matsumoto | 2025-07-15 |
| 12278122 | Heating device and heating method | Takashi Sugimoto, Hiroyuki Takahashi | 2025-04-15 |
| 12256503 | Electronic device | Masaaki Hiroki, Haruki KATAGIRI | 2025-03-18 |