Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362143 | Plasma processing apparatus and plasma processing method | Satoru Kawakami, Shinya Iwashita, Yusuke Suzuki | 2025-07-15 |
| 12312683 | Substrate processing method and substrate processing device | Munehito KAGAYA, Hiroyuki Onoda | 2025-05-27 |