Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374543 | Recess filling method and substrate processing apparatus | Yusuke Suzuki | 2025-07-29 |
| 12344933 | SiN film embedding method | Yusuke Suzuki | 2025-07-01 |
| 12331403 | Substrate processing method and substrate processing device | — | 2025-06-17 |
| 12312683 | Substrate processing method and substrate processing device | Tadashi MITSUNARI, Hiroyuki Onoda | 2025-05-27 |