Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12252786 | Cleaning method and substrate processing apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi, Tatsuya MIYAHARA, Keisuke Fujita +1 more | 2025-03-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12252786 | Cleaning method and substrate processing apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi, Tatsuya MIYAHARA, Keisuke Fujita +1 more | 2025-03-18 |