Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351904 | Film deposition method and method for forming polycrystalline silicon film | Yoshihiro TAKEZAWA, Daisuke Suzuki | 2025-07-08 |
| 12252786 | Cleaning method and substrate processing apparatus | Yoshihiro TAKEZAWA, Daisuke Suzuki, Hiroyuki Hayashi, Keisuke Fujita, Masami Oikawa +1 more | 2025-03-18 |