Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412768 | Semiconductor substrate processing apparatus | Jinhyuk Choi, Kongwoo Lee, Beomsoo Hwang, Myungki Song, Duckjin Kim +1 more | 2025-09-09 |
| 12224191 | Wafer transfer apparatus with aligner | Beomsoo Hwang, Kongwoo Lee, Myungki Song, Seojoo Choi, Jinhyuk Choi | 2025-02-11 |
| 12217984 | Wafer processing apparatus including EFEM and method of processing wafer | Jinhyuk Choi, Myungki Song, Kongwoo Lee, Beomsoo Hwang, Keonwoo KIM +1 more | 2025-02-04 |