Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412768 | Semiconductor substrate processing apparatus | Kongwoo Lee, Beomsoo Hwang, Myungki Song, Duckjin Kim, Kyusang Lee +1 more | 2025-09-09 |
| 12361733 | Apparatus and method with object detection | Seho SHIN, Byeongju LEE, Sung-hyun Chung, Dae Hyun JI | 2025-07-15 |
| 12264747 | Loadlock apparatus and substrate processing apparatus including the same | Kongwoo Lee, Beomsoo Hwang | 2025-04-01 |
| 12224191 | Wafer transfer apparatus with aligner | Beomsoo Hwang, Kongwoo Lee, Myungki Song, Kyusang Lee, Seojoo Choi | 2025-02-11 |
| 12217984 | Wafer processing apparatus including EFEM and method of processing wafer | Myungki Song, Kongwoo Lee, Kyusang Lee, Beomsoo Hwang, Keonwoo KIM +1 more | 2025-02-04 |