Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320782 | Acoustic measurement of fabrication equipment clearance | Jun DENG, Kuan-Wen Lin, Sheng-Chi Chin | 2025-06-03 |
| 12248131 | Portable confocal optical scanning microscopic device | Hsiao-Ying Wu, Shi-De Chen | 2025-03-11 |
| 12189304 | Method and structures for acoustic wave overlay error determination | Yu-Piao Fang | 2025-01-07 |