Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368066 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Chi-Hung Liao, Yueh-Lin Yang | 2025-07-22 |
| 12344929 | Multi-functional shutter disk for thin film deposition chamber | Wen-Hao Cheng, Yen-Yu Chen | 2025-07-01 |
| 12341042 | Method for depositing target material in deposition chamber with tiltable workpiece holder | Hsuan-Chih Chu, Wen-Hao Cheng, Yen-Yu Chen | 2025-06-24 |
| 12211756 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen | 2025-01-28 |