Issued Patents 2025
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429775 | Dispensing nozzle design and dispensing method thereof | Wei Chang Cheng | 2025-09-30 |
| 12411419 | Droplet splash control for extreme ultraviolet photolithography | Po-Ming SHIH | 2025-09-09 |
| 12394611 | Semiconductor tool for copper deposition | Chia-Hung Tsai, Chin-Szu Lee, Szu-Hua Wu, Jui-Hung Ho, Yu-Jen Chien | 2025-08-19 |
| 12379674 | Method and apparatus for improving critical dimension variation | Ming-Hsun LIN, Yu-Hsiang Ho, Teng Kuei Chuang, Jhun Hua Chen | 2025-08-05 |
| 12368066 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Yi-Ming Dai, Yueh-Lin Yang | 2025-07-22 |
| 12347716 | Method for cleaning electrostatic chuck | Yueh-Lin Yang | 2025-07-01 |
| 12327715 | Semiconductor tool for copper deposition | Chia-Hung Tsai, Chin-Szu Lee, Szu-Hua Wu, Jui-Hung Ho, Yu-Jen Chien | 2025-06-10 |
| 12287590 | Reduce mask defect impact by contamination decompose | Po-Ming SHIH | 2025-04-29 |