Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334314 | Dry etcher uniformity control by tuning edge zone plasma sheath | Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Ching Cheng, Chih-Teng Liao | 2025-06-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334314 | Dry etcher uniformity control by tuning edge zone plasma sheath | Yi-Tsang Hsieh, Yu-Hsi TANG, Chih-Ching Cheng, Chih-Teng Liao | 2025-06-17 |