Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394647 | Wafer shift detection | Ming-Sze Chen, Yuan-Hsin Chi, Sheng Lin | 2025-08-19 |
| 12241157 | System and method for cleaning a pre-clean process chamber | Yu-Ting Tsai, Hong-Ming Lo, Shao-Shuo Wu, Su-Yu Yeh | 2025-03-04 |