Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12363985 | Fluorine-free interface for semiconductor device performance gain | Yu-Ting Tsai, Chung-Liang Cheng, Chun-Chih Lin, Chyi-Tsong Ni | 2025-07-15 |
| 12241157 | System and method for cleaning a pre-clean process chamber | Yu-Ting Tsai, Hung-Chih Wang, Shao-Shuo Wu, Su-Yu Yeh | 2025-03-04 |