Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326397 | In-situ apparatus for detecting abnormality in process tube | Yu-Jen Yang, Kai-Lin Chuang, Yan Chen, Sheng-Ching Kao, Jun Liu | 2025-06-10 |
| 12272576 | Apparatus and methods for determining fluid dynamics of liquid film on wafer surface | Kai-Lin Chuang, Yan Chen, Jui Kuo LAI, Jun Liu | 2025-04-08 |
| 12190036 | Method and system for semiconductor wafer defect review | Chun-Wen Wang, Meng Ku Chi, Yan Chen, Jun Liu | 2025-01-07 |