Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326397 | In-situ apparatus for detecting abnormality in process tube | Yu-Jen Yang, Chung-Pin Chou, Kai-Lin Chuang, Yan Chen, Sheng-Ching Kao | 2025-06-10 |
| 12296428 | Chemical mechanical polishing apparatus and method | Yen-Liang Chen, Chia-Hsien Chou | 2025-05-13 |
| 12272576 | Apparatus and methods for determining fluid dynamics of liquid film on wafer surface | Chung-Pin Chou, Kai-Lin Chuang, Yan Chen, Jui Kuo LAI | 2025-04-08 |
| 12190036 | Method and system for semiconductor wafer defect review | Chung-Pin Chou, Chun-Wen Wang, Meng Ku Chi, Yan Chen | 2025-01-07 |
| 12191175 | Nozzle having real time inspection functions | Kai-Lin Chuang, Tsung-Chi Chen, Pei-Jung Chang, Chun-Wei Huang | 2025-01-07 |